Document Type : Review Article


1 institute of Microelectronics Technology and High Purity Materials RAS, Chernogolovka, 142432, Russia

2 Seismotronics LLC, Moscow, 127204, Russia

3 Moscow Institute of Physics and Technology (State University), Dolgoprudny, 141700, Russia

4 JCS Molecular Electronics Research Institute, Zelenograd, 124460, Russia

5 Landau Institute for Theoretical Physics RAS, Chernogolovka, 142432, Russia


In this paper, we consider technology and application of electrochemical transducers (ECT). Electrochemical systems are very promising for the development of a new element base for microelectronics. One of the most important directions is the design of micro-sized electrochemical acceleration and pressure sensors, and one of the most promising technologies is electrochemical transfer. Electrochemical transducers are very sensitive and energy-efficient and best suited for measuring weak mechanical movements. The basic principle consist in the following: microelectrodes are formed on a silicon chip and the chip is placed in a container with liquid electrolyte. Under the influence of an external mechanical signal, the electrolyte liquid starts moving (by inertia or by pressure) and transfers ions between the electrodes. The generated electric current is proportional to the external mechanical signal. We have developed a new microelectronic technology for electrochemical transducers, and have designed new instruments based on new electrochemical microelectronic chips. Currently, ECTs are applied for a variety of engineering tasks. ECTs are used to record the ground oscillation in the railway, in the tsunami early warning system, in electrochemical hydrophones for sea-bottom stations and for geoexploration systems, in the precise azimuth determination inertial systems. Copyright © VBRI Press.


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