Optical band-gap and associated Urbach energy tails in defected AlN thin films grown by ion beam sputter deposition: Effect of assisted ion energy

Neha Sharma; K. Prabakar; S. Ilango; S. Dash; A. K. Tyagi

Volume 2, Issue 5 , 2017, , Pages 342-346


  AIN thin films were grown by ion beam sputter deposition in reactive assistance of N+/N2+ ions on Si (100) substrates. During deposition, assisted ion energy (EA) was varied as 90 eV and 120 eV with a post deposition exposure to N2 plasma. The resultant films were characterized by grazing incidence x-ray ...  Read More