@article { author = {Oks, E.M. and Tyunkov, A.V. and Yushkov, Yu.G. and Zolotukhin, D.B.}, title = {Electron-beam Deposition of Ceramic Coatings}, journal = {Advanced Materials Proceedings}, volume = {4}, number = {2}, pages = {93-95}, year = {2019}, publisher = {International Association of Advanced Materials}, issn = {2002-4428}, eissn = {2002-441X}, doi = {10.5185/amp.2019.1453}, abstract = {This paper presents a novel technique for producing alumina ceramic coatings based on the evaporation of an aluminum oxide target by an electron beam in the middle vacuum range (5-30 Pa). The evaporation of ceramics by the electron beam enables to attain a coating deposition rate of up to 0.3 µm/min, and thus consider this as a practical alternative to existing methods. A special attention is devoted to the study of the surfaces of obtained coatings. The X-ray fluorescence analysis of the deposited coating showed the presence in the coating of all the elements that contained in the ceramic target being evaporated. The coating has a substantially homogeneous surface without any prominent pores. }, keywords = {plasma,electron beam,fore-vacuum}, url = {https://amp.iaamonline.org/article_16031.html}, eprint = {https://amp.iaamonline.org/article_16031_f70d5d118de4269fe37350f4bda4b8a0.pdf} }