Optimization of the SiC powder source size distribution for the sublimation growth of long crystal boules

Matthias Arzig; TaChing Hsiao; Peter J. Wellmann

Volume 3, Issue 9 , 2018, , Pages 540-543


  In this work we studied the influence of three different SiC powder size distributions and the sublimation behavior during physical vapor transport growth of SiC in a 3 inch crystal processing configuration. The evolution of the source material as well as of the crystal growth interface was carried out ...  Read More