Structural and optical study of amorphous hydrogenated silicon nitride thin film as antireflection coating on solar cell

Swati Mamgain

Volume 2, Issue 9 , 2017, , Pages 570-574

https://doi.org/10.5185/amp.2017/686

Abstract
  The structural, optical and electrical aspects of as deposited as well as annealed amorphous hydrogenated silicon nitride(a-SiNx: H) thin films of different stoichiometry, grown on silicon wafer by radio frequency- plasma enhanced chemical vapor deposition (RF-PECVD) are thoroughly investigated. Photoluminescence ...  Read More