Surface finish and subsurface damage distribution during diamond turning of silicon

Rohit Sharma; Neha Khatri; Vinod Mishra; Harry Garg; Vinod Karar

Volume 2, Issue 7 , 2017, , Pages 433-435

https://doi.org/10.5185/amp.2017/706

Abstract
  Subsurface Damage (SSD), which is introduced to optical materials by diamond turning processes, affects the performance in optical, laser and infrared applications. For optical applications, SSD can be the source of component instability (e.g., surface stress) and flaw. The objective of the present study ...  Read More