Electron-beam Deposition of Ceramic Coatings

E.M. Oks; A.V. Tyunkov; Yu.G. Yushkov; D.B. Zolotukhin

Volume 4, Issue 2 , 2019, , Pages 93-95

https://doi.org/10.5185/amp.2019.1453

Abstract
  This paper presents a novel technique for producing alumina ceramic coatings based on the evaporation of an aluminum oxide target by an electron beam in the middle vacuum range (5-30 Pa). The evaporation of ceramics by the electron beam enables to attain a coating deposition rate of up to 0.3 µm/min, ...  Read More