Thickness mod ulated structural and photo-luminescence properties of magnetron sputtered nanocrystalline SiC ultrathin films

Narendra Singh; Davinder Kaur

Volume 2, Issue 11 , 2017, , Pages 725-728

https://doi.org/10.5185/amp.2017/782

Abstract
  Ultrathin silicon carbide (SiC) films were grown on p type Si (100) substrate by RF magnetron sputtering at constant substrate temperature of 7000C for investigating thickness dependence of structural and photoluminescence properties. The structural and Photoluminescence properties were measured by X-ray ...  Read More